Alexandria Digital Research Library

Gallium nitride vertical electron transistors for high power applications

Author:
Yeluri, Ramya
Degree Grantor:
University of California, Santa Barbara. Electrical & Computer Engineering
Degree Supervisor:
Umesh K. Mishra
Place of Publication:
[Santa Barbara, Calif.]
Publisher:
University of California, Santa Barbara
Creation Date:
2013
Issued Date:
2013
Topics:
Engineering, Materials Science, Energy, and Engineering, Electronics and Electrical
Keywords:
Selective Area Regrowth
Gallium Nitride
Buried p-GaN
Vertical Electron Transistors
CAVETs
Power Transistors
Genres:
Online resources and Dissertations, Academic
Dissertation:
D.Eng.--University of California, Santa Barbara, 2013
Description:

Lateral GaN HEMT structures have been well studied and developed for high power applications. However, for very high breakdown voltages, a vertical device design is more favorable owing to better field distribution and higher power density. Current Aperture Vertical Electron Transistors (CAVETs) benefit from the high electron mobility of the 2-dimensional electron gas (2-DEG) in the lateral direction and better field distribution in the vertical direction. Current flows laterally in the 2-DEG at the AlGaN/GaN heterojunction and is directed vertically down to the drain through an aperture. A current blocking layer (CBL) is used to define the low resistance aperture. The focus of this thesis is developing CAVETS with Mg-doped conductive p-GaN layers as the current blocking layer. Current blocking is realized by the use of a reverse biased p-n junction as opposed to an insulating layer. The p-GaN is regrown either by Ammonia MBE or MOCVD and in order to ensure that the p-GaN layer remains active, the channel regrowth is done by Ammonia-MBE. The current blocking capacity of the p-n junction has been verified in an n/p/n structure and the highest breakdown voltage recorded was 870 V. The peak electric field has been estimated to be 3.1 MV/cm, which is close to the GaN critical field. With the current blocking capacity of the active p GaN layer verified, selective area regrowth was used to define the apertures and CAVETs were fabricated. Promising transistor performance was demonstrated with a high saturation current of 10.9 kA cm-2 and low ON-resistance of 0.4 mohm cm 2.

Physical Description:
1 online resource (176 pages)
Format:
Text
Collection(s):
UCSB electronic theses and dissertations
ARK:
ark:/48907/f3xs5sh7
ISBN:
9781303732119
Catalog System Number:
990041153670203776
Rights:
Inc.icon only.dark In Copyright
Copyright Holder:
Ramya Yeluri
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