Ammonothermal Growth of Gallium Nitride
- Degree Grantor:
- University of California, Santa Barbara. Materials
- Degree Supervisor:
- Shuji Nakamura and James S. Speck
- Place of Publication:
- [Santa Barbara, Calif.]
- Publisher:
- University of California, Santa Barbara
- Creation Date:
- 2012
- Issued Date:
- 2012
- Topics:
- Engineering, Materials Science
- Keywords:
- Ammonothermal,
Gallium Nitride,
Single Crystal, and
Bulk Crystal Growth - Genres:
- Online resources and Dissertations, Academic
- Dissertation:
- Ph.D.--University of California, Santa Barbara, 2012
- Description:
Bulk, single crystal Gallium Nitride (GaN) crystals are essential for enabling high performance electronic and optoelectronic devices by providing arbitrarily oriented, high quality, large, single crystal GaN substrates. Methods of producing single crystals of sufficient size and quality at a rate that would enable successful commercialization has been a major focus for research groups and companies worldwide. Recent advances have demonstrated remarkable improvements, though high cost and lack of high volume production remain key challenges.
Major investments in bulk GaN growth were made at UCSB with particular focus on the ammonothermal method. The existing lab was upgraded and a new facility was designed and built with improved experimental setups for ammonothermal growth of GaN. The facilities can simultaneously operate up to 15 reactors of differing designs and capabilities with the ability to grow crystals up to 2 inches in diameter. A novel in-situ technique was devised to investigate the growth chemistry which occurs at typical operating conditions of 3,000 atm and 600 °C.
Improvements in ammonothermal GaN include improved growth rates for c-plane by a factor of four to 344 mum/day with an overall record growth rate of 544 mum/day achieved for the (112¯2) plane. Crystal qualities comparable to that of the seed crystal were achieved. Impurity concentrations for transition metals were consistently reduced by a factor of 100 to concentrations below 1017 atoms/cm3. Optical transparency was improved by significantly reducing the yellow coloration typically seen for ammonothermal GaN. Single crystal GaN was successfully grown on large seeds and a 1 inch x ½ inch x ½ inch GaN crystal was demonstrated.
To better understand the growth chemistry, models were created for the decomposition of ammonia under growth conditions, with initial experiments performed using the designed in-situ setup to verify the model's accuracy.
To investigate the surface morphology and stability of basic ammonothermal GaN, various off-oriented HVPE GaN seed crystals were grown on and analyzed for growth rate, crystal quality, impurity incorporation, optical absorption, and surface morphology. A natural tendency for m-plane to off-orient itself by 0.5-1.5° towards-c-plane was observed, along with a region of apparent surface stability ranging from m-plane to {101¯1¯}.
- Physical Description:
- 1 online resource (236 pages)
- Format:
- Text
- Collection(s):
- UCSB electronic theses and dissertations
- Other Versions:
- http://gateway.proquest.com/openurl?url_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation&res_dat=xri:pqm&rft_dat=xri:pqdiss:3545082
- ARK:
- ark:/48907/f3vx0dg3
- ISBN:
- 9781267767806
- Catalog System Number:
- 990039148000203776
- Copyright:
- Siddha Pimputkar, 2012
- Rights:
In Copyright
- Copyright Holder:
- Siddha Pimputkar
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