Alexandria Digital Research Library

Synthesis and characterization of PDMS-based block copolymers toward sub-10nm nanopatterning

Author:
Luo, Yingdong
Degree Grantor:
University of California, Santa Barbara. Chemistry
Degree Supervisor:
Javier Read de Alaniz and Craig J. Hawker
Place of Publication:
[Santa Barbara, Calif.]
Publisher:
University of California, Santa Barbara
Creation Date:
2015
Issued Date:
2015
Topics:
Organic chemistry and Polymer chemistry
Keywords:
Flory-Huggins interaction parameter
Patterning
Thin film
Block copolymer
Direct self-assembly
PDMS
Genres:
Online resources and Dissertations, Academic
Dissertation:
Ph.D.--University of California, Santa Barbara, 2015
Description:

Block copolymer self-assembly has been used as nanopatterning towards applications of lithography for decades. For the purpose of smaller, faster and cheaper transistor developments, block copolymers with high Flory-Huggins parameter and better etching contrast need to be further developed. PDMS based block copolymers are of the most interest among all candidates. I synthesized a library of well defined PDMS-b-PMMA, PDMS-b-PS and PDMS-b-PEO through "click" chemistry. The Flory-Huggins interaction parameters of these block copolymers are characterized much higher than conventional block copolymers as expected. Therefore, sub-10 nm domain periods are achieved by these materials in bulk. Significantly, long range ordered nanoline and nanodot patterns have been produced by PDMS-b-PMMA. Furthermore, a small molecule (L)-tartaric acid used as a hydrogen bonding donor was proved to efficiently suppress the crystallinity of PEO and significantly enhance the self-assembly behavior. Finally, the triazole moiety in the middle of the block copolymer which synthesized by "click" chemistry was functionalized to produce an ionic junction block copolymer. The electrostatic interactions before the opposite charges act as an extra enthalpy to help the self-assembly. Therefore, order disorder transition temperature of the block copolymer was dramatically increased.

Physical Description:
1 online resource (183 pages)
Format:
Text
Collection(s):
UCSB electronic theses and dissertations
ARK:
ark:/48907/f3b27shg
ISBN:
9781339218977
Catalog System Number:
990045865730203776
Rights:
Inc.icon only.dark In Copyright
Copyright Holder:
Yingdong Luo
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